Building an Analyzing Focused Ion Beam for Nanotechnology

FIBLYS (or FIB anaLYSis) is a European funded project where leading researches and industry collaborate to create a new apparatus for nanotechnology that will unite nano-structuring, nano-manipulation, nano-analytic and nano-vision capabilities in one unique ‘multi-nano’ tool. It is based on a dual Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) together with Scanning Probe Microscope (SPM) and optional possibility of important analytical capabilities such as Energy Dispersive X-ray Spectroscopy (EDX), 3D Electron Backscatter Diffraction (EBSD), Time-of-Flight Mass Spectrometry (TOFMS), Electron Beam Induced Current (EBIC) or Cathodoluminescence (CL).