Building an Analyzing Focused Ion Beam for Nanotechnology

Au-source: gold ion source for FIB
c-SPM: conductive Scanning probe microscope (SPM)
CL: Cathodoluminescence
EBIC: Electron Beam Induced Current
EBSD: Electron Backscatter Diffraction
EDX: Energy Dispersive X-Ray Spectroscopy
FIB: Focused Ion Beam
FIB-SIMS: Combination of FIB and SIMS
Ga-source: gallium ion source for FIB
HRTEM: High Resolution Transmission Electron Microscopy
LED: Light emitting diode
MFM: Magnetic Force Microscopy
SEM: Scanning Electron Microscopy
SERS: Surface-enhanced Raman spectroscopy
SIMS: Secondary Ion Mass Spectroscopy
SNMS: Secondary Neutral Mass Spectrometer
SNOM: Scanning Near Field Optical Microscopy
SPM: Scanning Probe Microscope
TEM: Transmission Electron Microscopy
TERS: Tip-enhanced Raman spectroscopy
TOFMS: Time of Flight Mass Spectrometry
XRD: X-ray Diffraction