The distribution of the FIBLYS project tasks between partners, roughly chronologically arranged, is as follows:
- The SPM/nano-manipulation capabilities will be realized in close collaboration by the enterprise SmarACT and the institute OFFIS. While SmarAct will put their focus on the hardware of the nano-manipulator and the scanner-head, to be used as an SPM, OFFIS has its emphasis on the development of a suitable control of the AFM-Head (electronic and software) and the data processing of the SPM.
- In parallel the nano-near field EBIC, nano-near field CL and conductive-SPM techniques in the FIB(SEM) will be developed at the university institute LMEN, where a combined SPM/SEM setup is already available for these experiments.
- Still in parallel, enterprise TESCAN incorporates ExB mass-filtered FIB column with field-emission SEM (already carried out for common Ga-ion source FIB with tungsten SEM before the start of the project). This will enable to use Au-cluster ion source.
- Throughout the course of FIBLYS these techniques will be integrated into the development platform system at TESCAN site to form the core system once the SPM (nano-manipulation) integration has been carried out. For that purpose, an FIB(SEM) instrument that will be hooked up with novel chamber and beam/periphery geometries, including field emission SEM. The necessary soft- and hardware for a user-friendly in parallel use of the techniques and experimental options at the hybrid machine will be developed. Furthermore, the integration of analytical tools such as EBSD and EDX will be established.
- The enterprise TOFWERK will carry out the TOFMS integration with TESCAN and the support of the research institute EMPA.
- The research institute IPHT will develop the 3D tomography analytics partly at the development platform tool.
- IPHT will explore the Au-cluster source for deposition of Au-nanostructures for the applications in the fields of plasmonics, metamaterials and life-sciences.
- EMPA will test the functionality on model structure analyses in the field of solid-state physics: synthesis, nano-structuring and analytical test measurements.